JPS6057929A - パターン欠陥検出装置 - Google Patents

パターン欠陥検出装置

Info

Publication number
JPS6057929A
JPS6057929A JP58165075A JP16507583A JPS6057929A JP S6057929 A JPS6057929 A JP S6057929A JP 58165075 A JP58165075 A JP 58165075A JP 16507583 A JP16507583 A JP 16507583A JP S6057929 A JPS6057929 A JP S6057929A
Authority
JP
Japan
Prior art keywords
pattern
patterns
comparison
dimensionally
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58165075A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0517481B2 (en]
Inventor
Yoshimasa Oshima
良正 大島
Yasuhiko Hara
靖彦 原
Hiroshi Makihira
牧平　坦
Satoshi Fushimi
智 伏見
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58165075A priority Critical patent/JPS6057929A/ja
Priority to DE8484104785T priority patent/DE3476916D1/de
Priority to EP84104785A priority patent/EP0124113B1/en
Priority to US06/604,998 priority patent/US4614430A/en
Publication of JPS6057929A publication Critical patent/JPS6057929A/ja
Publication of JPH0517481B2 publication Critical patent/JPH0517481B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP58165075A 1983-04-28 1983-09-09 パターン欠陥検出装置 Granted JPS6057929A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP58165075A JPS6057929A (ja) 1983-09-09 1983-09-09 パターン欠陥検出装置
DE8484104785T DE3476916D1 (en) 1983-04-28 1984-04-27 Method of detecting pattern defect and its apparatus
EP84104785A EP0124113B1 (en) 1983-04-28 1984-04-27 Method of detecting pattern defect and its apparatus
US06/604,998 US4614430A (en) 1983-04-28 1984-04-27 Method of detecting pattern defect and its apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58165075A JPS6057929A (ja) 1983-09-09 1983-09-09 パターン欠陥検出装置

Publications (2)

Publication Number Publication Date
JPS6057929A true JPS6057929A (ja) 1985-04-03
JPH0517481B2 JPH0517481B2 (en]) 1993-03-09

Family

ID=15805389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58165075A Granted JPS6057929A (ja) 1983-04-28 1983-09-09 パターン欠陥検出装置

Country Status (1)

Country Link
JP (1) JPS6057929A (en])

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE37740E1 (en) 1988-02-19 2002-06-11 Kla-Tencor Corporation Method and apparatus for optical inspection of substrates
JP2002543463A (ja) * 1999-05-03 2002-12-17 ケーエルエー−テンカー コーポレイション レチクル検査中にグローバルデータを収集するための装置および方法
US7436993B2 (en) 2004-04-20 2008-10-14 Dainippon Screen Mfg. Co., Ltd. Apparatus and method for detecting defects in periodic pattern on object
JP2022033027A (ja) * 2020-08-11 2022-02-25 アプライド マテリアルズ イスラエル リミテッド ウエハ分析のための較正データを生成する方法およびシステム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57194304A (en) * 1981-05-27 1982-11-29 Hitachi Ltd Inspecting method for circuit pattern

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57194304A (en) * 1981-05-27 1982-11-29 Hitachi Ltd Inspecting method for circuit pattern

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE37740E1 (en) 1988-02-19 2002-06-11 Kla-Tencor Corporation Method and apparatus for optical inspection of substrates
JP2002543463A (ja) * 1999-05-03 2002-12-17 ケーエルエー−テンカー コーポレイション レチクル検査中にグローバルデータを収集するための装置および方法
US7436993B2 (en) 2004-04-20 2008-10-14 Dainippon Screen Mfg. Co., Ltd. Apparatus and method for detecting defects in periodic pattern on object
JP2022033027A (ja) * 2020-08-11 2022-02-25 アプライド マテリアルズ イスラエル リミテッド ウエハ分析のための較正データを生成する方法およびシステム

Also Published As

Publication number Publication date
JPH0517481B2 (en]) 1993-03-09

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